The vibration resistance of a vacuum integrated valve is a key characteristic that determines its stable operation during equipment operation, directly impacting the vacuum system's vacuum maintenance and overall operational reliability. In industrial production, many devices using vacuum integrated valves (such as semiconductor manufacturing equipment, vacuum coating machines, and vacuum dryers) generate vibration during operation due to motor rotation, mechanical transmission, or external environmental influences. If the valve's vibration resistance is insufficient, vibration can cause internal valve components to loosen, seals to fail, or the valve core to become stuck, leading to vacuum leaks, reduced control accuracy, and even interruptions to the production process. Therefore, evaluating the vibration resistance of the vacuum integrated valve to ensure its ability to withstand the vibration environment experienced during equipment operation is crucial to ensuring the stability of the vacuum system.
From the perspective of the structural design of vacuum integrated valves, high-quality products will enhance vibration resistance through multi-dimensional structural optimization. First, when selecting valve body materials, high-strength, high-rigidity metals (such as 316L stainless steel and titanium alloys) are preferred. These materials effectively resist deformation caused by vibration and reduce component misalignment due to valve body deformation. Second, internal component fixation is designed to prevent loosening. For example, the valve core and stem are connected using an interference fit or welding to prevent vibration-induced loosening. Fasteners such as bolts and nuts are secured with anti-loosening washers, spot welding, or thread lockers to prevent vibration-induced loosening. Furthermore, some high-end vacuum integrated valves incorporate buffer structures in vibration-prone areas (such as sensors and solenoid coils). These structures absorb vibration energy through elastic elements (such as silicone pads and springs), reducing the impact on core components and providing structural protection for vibration resistance.
The anti-vibration design of the sealing structure is a key component in ensuring that vacuum integrated valves can adapt to vibrating environments. Vacuum systems require extremely high sealing performance. If vibration causes the sealing structure to fail, it can directly lead to vacuum leaks. To address this issue, vacuum integrated valves with excellent vibration resistance employ specialized sealing designs. For example, metal-to-metal hard seals or high-performance elastomer seals (such as fluororubber and perfluoroelastomer) are used at the sealing surface between the valve core and the valve seat. Precise machining processes ensure the smoothness and fit of the sealing surface, maintaining a strong seal even in vibrating environments. Multiple seals or flexible sealing structures are employed at the connections between the valve body, end cap, and pipeline to prevent vibration-induced seal displacement or deformation. Furthermore, some products incorporate support rings around the seals to enhance the seal's vibration resistance and prevent wear or accelerated aging caused by long-term vibration.
The vibration resistance of vacuum integrated valves is also verified through rigorous vibration testing to ensure their adaptability to the vibration environment experienced during actual equipment operation. During testing, key valve indicators such as vacuum leakage rate, valve core response speed, and control accuracy are monitored. If these indicators remain within acceptable limits under specified vibration conditions, the valve's vibration resistance meets the requirements. For example, in vibration tests simulating the 5-500Hz, 0.1mm amplitude common in semiconductor equipment, high-quality vacuum integrated valves can maintain a vacuum leakage rate below 1×10⁻¹⁰ Pa・m³/s, and the valve core response time fluctuation does not exceed ±5%, making them fully adaptable to the equipment's vibration environment.
The vibration resistance requirements for vacuum integrated valves vary depending on the frequency, amplitude, and direction of vibration during equipment operation, and suitability must be determined based on specific operating conditions. For example, integrated valves used in vacuum coating equipment primarily experience low-frequency (10-50Hz) and large-amplitude (0.2-0.5mm) mechanical vibrations during operation, requiring the valve to have strong resistance to low-frequency vibrations. In contrast, integrated valves used in semiconductor etching equipment experience higher vibration frequencies (100-1000Hz) and smaller amplitudes (0.01-0.1mm), requiring the valve to maintain stable valve core operation under high-frequency vibrations. If the vibration resistance parameters of a vacuum integrated valve (such as maximum tolerated vibration frequency and amplitude) match the actual vibration conditions of the equipment, it will remain stable over long-term use. If these parameters do not match, even if the valve performs well under normal vibration conditions, it may malfunction in the vibration environment of a specific equipment.
Daily use and maintenance can also affect the vibration resistance of the vacuum integrated valve, thereby affecting its adaptability to the vibration environment. Failure to securely fasten the valve according to specifications during installation, or installation near a vibration source, can exacerbate the impact of vibration on the valve. Failure to promptly check the condition of fastening components after long-term use can cause vibration to loosen components that were previously designed to prevent loosening, reducing vibration resistance. Therefore, when installing a vacuum integrated valve, choose a location away from major vibration sources and use dedicated brackets or shock-absorbing pads to secure the valve body. During regular maintenance, check for loose fastening components and the integrity of the sealing structure, and promptly replace any aging buffer components to ensure the valve's vibration resistance remains in good condition and continuously adapts to the equipment's vibration environment.
High-quality vacuum integrated valves, through scientific structural design, reliable sealing solutions, and rigorous vibration testing, offer strong vibration resistance and can effectively adapt to the vibration environments encountered in most equipment. However, specific compatibility must be determined based on the equipment's actual vibration conditions (frequency, amplitude, and direction) and the valve's vibration resistance parameters. Furthermore, standardized installation and maintenance are essential to ensure long-term, stable operation of the valve in vibrating environments and safeguard the normal operation of the vacuum system.
